Characteristics improvement of pressure transfer standard using a silicon resonant sensor

Abstract

In the field of pressure measurement, numerous interlaboratory comparisons are carried out among National Metrology Institutes (NMIs) using a pressure transfer standard to verify the degrees of equivalence. Here, the Yokogawa electric corporation has been producing a series of digital manometers using a silicon resonant sensor developed independently. This sensor demonstrates excellent long-term stability and has thus been adopted as the pressure transfer standard by many NMIs and has been subsequently well received. The pressure transfer standard is known as the resonant silicon gauge (RSG) among NMIs. From December 2016, the National Metrology Institute of Japan (NMIJ), the Advanced Industrial Science and Technology (AIST) institute, and Yokogawa initiated a collaborative research with the aim of improving the characteristics of the RSGs and developing a portable transfer standard using a new silicon resonant sensor. The new RSG was adjusted using a standard device calibrated by either NMIJ or Yokogawa. The measurement values of the standard device were corrected with the calibration results and used as the standard values for adjustment of the new RSG. The linearity of the new RSG adjusted via the proposed method was improved compared with that of a conventional RSG.