Enhanced measurement of high aspect ratio surfaces by applied sensor tilting

Authors

  • Alexander Schuler Friedrich-Alexander-Universität Erlangen-Nürnberg, Chair Quality Management and Manufacturing Metrology
  • Albert Weckenmann Friedrich-Alexander-Universität Erlangen-Nürnberg, Chair Quality Management and Manufacturing Metrology
  • Tino Hausotte Friedrich-Alexander-Universität Erlangen-Nürnberg, Institute of Manufacturing Metrology

DOI:

https://doi.org/10.21014/acta_imeko.v3i3.124

Abstract

During tactile surface measurements the contact point between probing tip and surface varies depending on the local surface angle. To reduce the resulting measurement deviation on high slopes a probing principle is investigated that applies a dynamic surface dependent sensor tilt. This probing process and the logics for the angle determination have been evaluated by simulation. A test stand based on a nanometer coordinate measuring machine is developed and fitted with a rotation kinematic based on stacked rotary axes. Systematic positioning deviations of the kinematic are reduced by a compensation field. The test stand has been completed and results are presented.
ACTA IMEKO Vol 3 No 3 (2014)

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Published

2014-09-23

Issue

Vol. 3 No. 3 (2014)

Section

Research Papers

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