Errors in the Vickers diagonal length measurement caused by different designs of microscopes

Authors

  • S. Takagi National metrology institute of Japan, AIST Tsukuba
  • Y. Tanaka National metrology institute of Japan, AIST Tsukuba
  • Y. Seino National metrology institute of Japan, AIST Tsukuba

DOI:

https://doi.org/10.21014/acta_imeko.v9i5.981

Abstract

The errors in the Vickers diagonal length measurement are discussed from the point of view of the design of microscope. Effects of the numerical aperture (NA) of an objective lens are evaluated through the experiment. With smaller NA, the resolving power of the microscope gets worse and the depth of focus gets deeper as predicted Rayleigh’s criterion. The relationship between the repeatability of diagonal length and the objective NA follows the theory. In addition, the variation of NA relates the measured diagonal length. Those effects are much significant than the image resolution or the minimum count of a measuring system.

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Published

2020-12-31

Issue

Vol. 9 No. 5 (2020): Special issue for TC3, TC5, TC16 and TC22

Section

Conference Submissions

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