Performance test of cantilever transfer standard used for afm tip calibration based on electromagnetic compensation

Authors

  • J. Jiang Laboratory of Force and Torque Division of Mechanics and Acoustics National Institute of Metrology Beijing
  • H. Zhou Laboratory of Photoelectric Detection and Image Processing School of Precision Instrument and Opto-electronic Engineering Tianjin University
  • Y. Zhang Laboratory of Force and Torque Division of Mechanics and Acoustics National Institute of Metrology Beijing
  • S. Wu Laboratory of Force and Torque Division of Mechanics and Acoustics National Institute of Metrology Beijing
  • Z. Zhang Laboratory of Force and Torque Division of Mechanics and Acoustics National Institute of Metrology Beijing
  • G. Hu Laboratory of Force and Torque Division of Mechanics and Acoustics National Institute of Metrology Beijing

DOI:

https://doi.org/10.21014/acta_imeko.v9i5.954

Abstract

This paper describes stiffness measurement of cantilever transfer standards used for Atomic Force Microscopy (AFM) tip calibration based on electromagnetic compensation. The transfer standard of cantilever is designed and manufactured based on the bulk fabrication of SOI wafers. The measure range of the transfer standard covers from 0.04 N/m to 16 N/m. The series of transfer standard is designed for the calibration test of the cantilever used in AFM, along with the test apparatus specifically designed. The relative uncertainty of the stiffness is smaller than 2.4 % (k = 2).

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Published

2020-12-31

Issue

Vol. 9 No. 5 (2020): Special issue for TC3, TC5, TC16 and TC22

Section

Conference Submissions

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