Investigation of the repeatability of a cleaning method for silicon spheres by gravimetric measurements

M. Mecke, M. Borys, E. Beyer


After a short description of the metrological relevance of silicon spheres and the applied cleaning method, mass measurements of silicon spheres in vacuum and the evaluation of the results are outlined. The results show that the mass of silicon spheres in vacuum stabilises in the microgram range within two to three days after cleaning and that the repeatability of the applied cleaning method can be characterised by a standard deviation in the order of two micrograms.

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