Investigation of the repeatability of a cleaning method for silicon spheres by gravimetric measurements

Authors

  • M. Mecke Physikalisch-Technische Bundesanstalt (PTB) Bundesallee 100 38116 Braunschweig
  • M. Borys Physikalisch-Technische Bundesanstalt (PTB) Bundesallee 100 38116 Braunschweig
  • E. Beyer Physikalisch-Technische Bundesanstalt (PTB) Abbestraße 2-12 10587 Berlin

DOI:

https://doi.org/10.21014/acta_imeko.v9i5.930

Abstract

After a short description of the metrological relevance of silicon spheres and the applied cleaning method, mass measurements of silicon spheres in vacuum and the evaluation of the results are outlined. The results show that the mass of silicon spheres in vacuum stabilises in the microgram range within two to three days after cleaning and that the repeatability of the applied cleaning method can be characterised by a standard deviation in the order of two micrograms.

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Published

2020-12-31

Issue

Vol. 9 No. 5 (2020): Special issue for TC3, TC5, TC16 and TC22

Section

Conference Submissions

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