Single image geometry inspection using inverse endoscopic fringe projection

Abstract

Fringe projection is an important technology for the measurement of free form elements in several application fields. It can be applied for geometry elements smaller than one millimeter. In combination with deviation analysis algorithms, errors in fabrication lines can be found promptly to minimize rejections. However, some fields cannot be covered by the classical fringe projection approach. Due to shadowing, filigree form elements on narrow or internal carrier geometries cannot be captured. To overcome this limitation, a fiberscopic micro fringe projection sensor was developed. The new device is capable of resolutions of less than 15 µm with uncertainties of about 35 µm in a workspace of 3 × 3 × 3 mm³.
Using standard phase measurement techniques, such as Gray-code and cos²-patterns, measurement times of over a second are too high for in-situ operation. The following work will introduce a new approach of applying a new one image measuring method to the fiberscopic system, based on inverse fringe projection. The fiberscopic fringe projection system employs a laser light source in combination with a digital micro-mirror device (DMD) to generate fringe patterns. Fiber optical image bundles (FOIB) are used in combination with gradient-index lenses to project these patterns on the specimen. This advanced optical system creates high demands on the pattern generation algorithms to generate exact inverse patterns for arbitrary CAD-modelled geometries. Approaches of the optical simulations in the context of the complex beam path, together the drawbacks of the limited resolutions of the FOIBs shall be discussed. Early results of inverse pattern simulations using a ray tracing approach of a pinhole system model are presented.