Imaging interference microscope for nanometrology

Authors

  • Igor Malinovsky INMETRO
  • Iakyra B. Couceiro INMETRO
  • Ricardo Santos Franca INMETRO
  • Mauricio S. Lima INMETRO
  • Carlos L. S. Azeredo INMETRO
  • Clara M. S. Almeida INMETRO
  • Jean P. von der Weid Telecommunication Center (CETUC), Catholic University (PUC-Rio)

DOI:

https://doi.org/10.21014/acta_imeko.v3i3.98

Abstract

Here we report the development of the primary nanometrology capacity at the National Metrology Institute of Brazil (INMETRO). An interference microscope of the Linnik type has been developed and subjected to optimization and characterization studies. The recording of the fringes is done by an automated CCD system with 2 possible processing approaches: interferometric pattern processing and the phase stepping technique. Current progress in the development of the hardware and software adequate for sub- nanometer resolution of the instrument is reported. A study of systematical errors of the interference microscope has been performed. The instrument is aimed for international key comparisons of step height standards.

Author Biographies

Igor Malinovsky, INMETRO

DIOPT

Invited researcher

Iakyra B. Couceiro, INMETRO

DIOPT

Head of division

Ricardo Santos Franca, INMETRO

DIOPT

Researcher

ACTA IMEKO Vol 3 No 3 (2014)

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Published

2014-09-23

Issue

Vol. 3 No. 3 (2014)

Section

Research Papers

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