Study of some systematic effects in Mitutoyo short gauge block interferometer

Authors

  • Walter Oliveria Inmetro
  • Ricardo França
  • Iakyra Couceiro
  • Igor Malinovsky

DOI:

https://doi.org/10.21014/actaimeko.v14i2.1979

Keywords:

optical interferometry, gauge block, systematic effects, phase stepping, imaging

Abstract

In this work, the systematic effects related to optics and fringe fraction extraction of the Mitutoyo gauge block interferometer (GBI) short gauge interferometer were evaluated. Some parameters, such as the front wave curvature, imager defects and uncertainty associated with fringe fraction extraction from phase stepped interferometric image stacks were analyzed. A new proprietary software for phase extraction was developed and used. The software utilizes the direct fit of the sinusoidal wave to all measured phase points. A better evaluation of effects from GBI data processing was possible due to this locally developed software. The high quality of the optics of the GBI is demonstrated through the analysis of the height maps of the Mitutoyo reference flat plate. The metrological analysis shows possible directions of improvement of the interferometer.

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Published

2025-06-26

Issue

Vol. 14 No. 2 (2025)

Section

Research Papers

License

Copyright (c) 2025 Walter Oliveria, Ricardo França, Iakyra Couceiro, Igor Malinovsky

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