Characterization of spinning rotor gauge-3 using orific flow system and static expansion system

Authors

  • Ashok Kumar CSIR-National Physical Laboratory Dr. K. S. Krishnan Marg Delhi 110012 and Academy of Scientific and Innovative Research (AcSIR) Ghaziabad-201002
  • Vikas N. Thakur CSIR-National Physical Laboratory Dr. K. S. Krishnan Marg Delhi 110012 and Academy of Scientific and Innovative Research (AcSIR) Ghaziabad-201002
  • Harish Kumar CSIR-National Physical Laboratory Dr. K. S. Krishnan Marg Delhi 110012

DOI:

https://doi.org/10.21014/acta_imeko.v9i5.993

Abstract

This article elucidates the calibration of newly procured spinning rotor gauge (SRG 3) from MKS Instruments, USA using primary vacuum standards: Orifice flow system (OFS) and Static expansion system (SES) established at National Physical Laboratory, India (NPLI) in the range of 10-4 Pa to 1 Pa and further compared with manufacturer reported value which was calibrated by transfer standard of National Institute of Standards & Technology (NIST). The key parameters to calculate the pressure measured by SRG is the accommodation coefficients. The accommodation coefficients for N2 gas obtained using OFS, SES, and calibration report form NIST USA (SRG2) are 0.957, 0.961, and 0.954 respectively.

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Published

2020-12-31

Issue

Vol. 9 No. 5 (2020): Special issue for TC3, TC5, TC16 and TC22

Section

Conference Submissions

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